Ultra High Purity Fluoropolymer (PFA) Valves - 22 Series

UHP Fluoropolymer ultra clean valves are made from PFA and PTFE for semiconductor liquid applications including high concentration acids and bases, clear chemistries and slurries.

Полное описание продукта

These new, ultra clean, fluoropolymer, manual and pneumatic valves offer increased flow and provide better seat sealing for enhanced, leak-free performance for greater safety. They are designed to deliver the highest flow in the smallest package available. Computational fluid dynamics software was utilized to maximize the flow through these valves. These ultra clean valves are for semiconductor liquid applications including high concentration acids and bases, clear chemistries and slurries. Other demanding markets can use these valves for their cleanliness and ability to carry highly corrosive chemicals.

Markets:
• Semiconductor processing
• Chemical Processing
• Analytical Equipment
• Laboratory

Features/Benefits:
• High cycle life in acids and slurry
• Compact footprint with a true lock-out, tag-out design (LOTO)
• Dual point seal provides double the sealing power (patent pending)
• Smooth bore and fully swept path, minimizes particle entrapment areas and prevents stagnation
• 100% leak tested
• Meets SEMI-F57-0301 Standards

Key Applications:
• Chemical Mechanical Polishing (CMP) Slurries
• Ultra high purity processes
• Clear chemistries for semiconductor processes
• Blender systems
• Cleaning systems

Характеристики

Материал корпуса:	PFA
Материал диафрагмы:	Modified PTFE
Материал корпуса:	PVDF
Материал пружины:	SS, Fluoropolymer Coated
Материал винта:	SS
Максимальное рабочее давление:	80 psig
Давление срабатывания:	60 to 100 psig
Рабочая температура:	32 to 212 °F, 0 to 100 °C
Испытательное давление:	120 psig
Давление разрыва:	200 psig
Расход:	0.33, 0.82, 2.3, 4.3