Ultrahigh-purity (UHP) High-flow Diaphragm Valve – 970 Series 970AOPLPNCSFS8MF

The 970 Series Diaphragm Valve offers high cycle life and exceptional leak integrity. It can be manually or air-operated and is ideally suited for use in high-flow ultrahigh-purity semiconductor tool.

The Parker 970 provides high flow, .70 Cv, and superior leak integrity, making it ideal for use in ultra-high purity semiconductor tool applications, including gas boxes, gas cabinets, and valve manifold boxes (VMBs).

The 970 Series features a full internal and external electropolish resulting in a surface finish on all wetted surfaces. This, coupled with its internally springless and threadless design, results in reduced gas entrapment potential and minimal particle generation. The valve body is constructed from Veriflo’s low-sulfur, high-purity Vericlean™ 316L Stainless Steel, affording it long life and higher resistance to corrosion. The replaceable valve seats are manufactured from PCTFE resulting in exceptional shut-off performance, and lower cost of ownership.

The 970 series diaphragm valve offers high flow, .70 Cv, in a compact package, which makes it suitable for use in situations where workable space is limited, such as gas boxes, gas cabinets, and valve manifold boxes (VMBs). It can be manually or air-operated with a maximum operating pressure of 250 and 150 psig respectively.

All 970 Series valves are inboard and across-seat Helium leak tested using a mass spectrometer to ensure performance and reliability in applications where leak integrity is critical.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace

Features/Benefits:
• Standard surface finish of 5 micro inch Ra
• Flow capacity = 0.70 Cv
• High cycle life
• Internally springless and threadless design minimizes particle generation and gas entrapment
• Internal leak rate: ≤1 x 10-9 scc/sec He (rated)
• External leak rate: ≤2 x 10-10 scc/sec He
• AOP actuation pressure: 70 – 125 psig nominal
• Internal volume 0.59 cc (including face seal fittings)
• Maximum Operating Pressure: 250 psig (manual), 150 psig (AOP)

Applications:
• Corrosive and specialty gases
• Gas boxes
• Gas cabinets
• Valve manifold boxes (VMB)

VeriClean™ is a trademark of Parker Hannifin Corporation

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