Ultra-High Purity (UHP) High-pressure Diaphragm Valve – 945 Series 945MSFSFM

The 945 Series Diaphragm Valve provides excellent reliability and leak integrity, making it ideal for use in UHP applications. Available in configurations with flow capacities up to 0.25 Cv and working pressures up to 3,500 psig.

The Parker 945 Series Stainless Steel Diaphragm Valve offers excellent leak integrity, high cycle life, and low particle generation from vacuum up to 3,500 psig. It is ideal for use in UHP semiconductor applications, including high-pressure process lines, gas cabinets, and valve manifold boxes (VMBs).

945 Series valves can either be manually or air-operated. Both versions are internally springless and threadless, which minimizes particle generation and entrapment for reduced process contamination. The valve’s exacting design controls seat and diaphragm stresses to provide a reliable and maintenance-free service life. The valve also features a unique compression member that loads the seal uniformly without the need for threaded components or crimping operations.

945 Series wetted components are fabricated from specialty metals to provide exceptional corrosion resistance and leak integrity. The body is made from Veriflo’s proprietary internally electropolished VeriClean™ 316L stainless steel. The diaphragm is a high-strength cobalt-based alloy. Seat materials are available in PCTFE, PEEK® or Vespel®, which allow the 945 Series to be used with a wide range of hazardous and inert process fluids. These materials, combined with the valve’s exacting design features, afford it extreme corrosion resistance and excellent reliability at working pressures up to 3,500 psig. Air-operated versions can be configured to provide open-close position indication with a limit switch.

All 945 Series valves are fabricated in a Class 100 cleanroom. The internal (seat) seal and metal external seal are Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features/Benefits:
• Machined on tube stubs, which allows for improved dimensional control
• 5 microinch (Ra) electropolish surface finish
• High cycle life (including corrosive service)
• Internally springless and threadless design minimizes particle generation and gas entrapment
• Fully functional from vacuum to 300 psig
• Internal leak rate: ≤ 1 x 10-9 scc/sec He
• External leak rate: ≤ 2 x 10-10 scc/sec He
• 75 psig nominal AOP actuation pressure (maximum)

Applications:
• Corrosive and specialty gases
• Semiconductor Tools
• Tool Hook-ups
• Gas Cabinets
• Valve Manifold Boxes (VMB)

Vespel® is a registered trademark of DuPont Performance Elastomers L.L.C.
VeriClean™ is a trademark of Parker Hannifin Corporation
PEEK™ is a trademark of Victrex plc.

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